Introduction

The BSE (Back Scattered Electron) image contrast differs depending on both the take-off angle and energy of backscattered electrons. This contrast change needs to be visualized as some informationmay remain hidden when usingmore conventional BSE detection systems.
The new TESCAN CLARA ultra-high-resolution scanning electron microscope (UHR-SEM), based on TESCAN’s BrightBeamTM technology, enables variable, filtered BSE detection. One of the featuresof the TESCAN CLARA’s BSE detection system is the electron filtering based on take-off angle which allows users to explore three different contrast mechanisms.