SuperFlat AFM

Combining the power of SEM and AFM

Key Features
- Compact. With a height of only 10 mm the SuperFlat AFM is extremely compact. The ability for use in load lock configurations allows for fast turn around whilst maintaining chamber cleanliness.
- Stable. Noise levels in high vacuum of 0.3 nm for contact mode and 0.5 nm for dynamic mode, combined with Nanosurf ’s SPM controller and easy-to-use control software brings SPM characterisation to all SEM users.
- Versatile. Providing 3D information from simultaneous SEM and AFM pictures and the ability to use it in both SEM and stand-alone air environments makes it extremely versatile.

Related Products

All
AFM/SPM/SNOM
CL
CLEM
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EBSD
EDS
Electron Beam Lithography (EBL)
Electron Microscopy
Fabrication
FIB
Hyperspectral
In situ
Micro XRF
Microscopy
Raman
SEM
Spectroscopy
TEM
Thermal Probe Lithography
WDS
X-ray Imaging
X-ray Microscopy

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