TESCAN MIRA

Versatile and powerful analytical FEG SEM

World’s most versatile and powerful analytical FEG SEM for both high and low-vacuum operations

Key Features
- Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for enhanced field of view or depth of focus, etc.
- Real-time In-Flight Beam Tracing™ for performance and beam optimisation, which also allows direct and continuous control of the beam and beam current Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages
- High relolution Eectron Beam Lithography (EBL) platform able to creat sub-10nm features with highly complex structures using the powerful TESCAN DrawBeam software
- Electron Channelling Pattern aquisition on polycrystalline maerials with just one click column setup
- Beam Deceleration Technology and InBeam detectors allow imaging under extreley low energy and current beam for high resolution and surface sensitive imaging
- Extremely robust and low maintenance FEG SEM

Related Products

All
AFM/SPM/SNOM
ARPES
Automated Mineralogy
Biological Microscopy
CL
CLEM
Computed Tomography
Diffraction Imaging
EBSD
EDS
Electron Beam Lithography (EBL)
Electron Microscopy
Fabrication
FIB
Hyperspectral
In situ
Laser spectroscopy
Micro XRF
Microscopy
Protein
Protein Crystallography
Raman
SEM
Spectroscopy
TEM
Thermal Probe Lithography
WDS
X-ray Imaging
X-ray Microscopy

Lightning Arctic – In situ TEM Solution with Cooling/Heating and Biasing

Lightning Arctic – In situ TEM Solution with Cooling/Heating and Biasing

In situ

In Situ TEM Cooling, Biasing & Heating for your TEM

Cathodyne - Optical Cathodoluminescence

Cathodyne - Optical Cathodoluminescence

CL

A fast and sensitive optical CL imaging system that uses a plasma source and doesn't need a SEM to work.

ExoSEM - Ex Situ Bench for Thermo-Mechanical Testing

ExoSEM - Ex Situ Bench for Thermo-Mechanical Testing

In situ

360° viewing during a thermal or thermomechanical test outside your SEM

FurnaSEM - in situ SEM Furnace

FurnaSEM - in situ SEM Furnace

In situ

In Situ SEM furnace ideal for high temperature studies up to 1300°C. perform dynamic studies inside your SEM or under an optical microscope.

MT 1000 Tensile/Compression Stage

MT 1000 Tensile/Compression Stage

In situ

The most precise and functional thermo-mechanical testing system on the market

TESCAN TENSOR - 4D STEM

TESCAN TENSOR - 4D STEM

TEM

A STEM that is as easy to use as a SEM

UHV FIB-SEM NanoSpace

UHV FIB-SEM NanoSpace

AFM/SPM/SNOMCLEDSElectron MicroscopyFabricationFIBSEMWDS

A versatile platform ideally suited to FIB-SEM applications in an UHV and contamination free environment

Model 1062 TrionMill

Model 1062 TrionMill

Electron MicroscopySEMTEM

Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses at shortest possible time and largest possible size.

LiteScope - AFM in Your SEM

LiteScope - AFM in Your SEM

AFM/SPM/SNOMElectron Microscopy

Correlative in situ AFM and SEM

Celeritas

Celeritas

TEM

A revolutionary new direct detection camera for four-dimensional scanning transmission electron microscopy (4D STEM) delivering more speed, more pixels and exceptional image quality.

Apollo

Apollo

Diffraction ImagingElectron MicroscopyTEM

The world’s first event-based camera for high-throughput cryo-EM with no compromise in the QE and speed

TESCAN VEGA Compact

TESCAN VEGA Compact

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Competitively priced, the TESCAN VEGA Compact is the ideal SEM for routine analysis in industrial labs or a teaching/imaging workhorse in microscopy facilities.

Model 2560 Vacuum Transfer Tomography Holder

Model 2560 Vacuum Transfer Tomography Holder

Electron MicroscopyIn situTEM

An ideal platform to protect environmentally sensitive material during transfer to TEM’s

METEOR

METEOR

CLEMSEM

METEOR is the world’s first and only fully integrated solution to optimise the cryo-ET workflow by reducing complicated transfer steps and increasing sample yield

FIB Stub 3.0

FIB Stub 3.0

In situ

Prepare lamellae directly on your Nano-chip inside your FIB

TESCAN MAGNA

TESCAN MAGNA

Electron Microscopy

Ultimate UHR-SEM with TESCAN TriLens™ immersion optics technology

TESCAN CLARA

TESCAN CLARA

Electron Microscopy

The only UHR-SEM on the market that doesn’t discriminate between samples

TESCAN SOLARIS

TESCAN SOLARIS

FIB

Highest quality TEM lamellae preparation and superior analytical performance

TESCAN SOLARIS X - Xe Plasma FIB-SEM for Semiconductors

TESCAN SOLARIS X - Xe Plasma FIB-SEM for Semiconductors

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBMicroscopySEMTEMWDS

Xe plasma FIB-SEM for Semiconductors

Alvéole PRIMO

Alvéole PRIMO

Biological MicroscopyElectron MicroscopyProteinTEM

Engineer custom microenvironments and fine-tune their mechanical and biochemical properties, at the micrometer scale

QM Quantum Microscope

QM Quantum Microscope

ARPESDiffraction ImagingLaser spectroscopy

Completely configurable, the QM comprises a laser source (EUV and/or VUV), amplifier, beamline tailored to the user’s experiment, and imaging or other analysis workstations that can effectively cover the microscopy/spectroscopy landscape for nano-to-quantum materials

AttoMap

AttoMap

Micro XRF

The Most Advanced XRF Microscope Assembled for a Homelab

SPARC

SPARC

CLHyperspectralRamanSEMSpectroscopy

SPARC: High-performance SEM cathodoluminescence detector

Eucentric Five Axis Table

Eucentric Five Axis Table

EDSFIBSEM

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.

TESCAN DynaTOM

TESCAN DynaTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A dedicated 4D X-ray imaging

XtalCheck-S - Crystallography Screening

XtalCheck-S - Crystallography Screening

In situProtein Crystallography

Screen protein crystals on a single crystal X-ray diffractometer

Model 2550 Cryo Transfer Tomography Holder

Model 2550 Cryo Transfer Tomography Holder

Electron MicroscopyIn situTEM

Cryo transfer and tomography of thin-film frozen-hydrated/vitrified specimens for low dose imaging and analysis

Model 1070 NanoClean

Model 1070 NanoClean

Electron MicroscopySEMTEM

Cleans specimens and holders immediately before insertion into an electron microscope; removes existing carbonaceous debris from the specimen and prevents contamination during imaging and analysis

Model 1051 TEM Mill

Model 1051 TEM Mill

Diffraction ImagingFIBTEM

Table top precision preparation for producing high quality TEM samples for a wide variety of applications

Model 1080 PicoMill

Model 1080 PicoMill

Diffraction ImagingFIBTEM

The FIB is highly effective in preparing TEM specimens, but the use of a high-energy, liquid metal ion source can often result in specimen amorphization, gallium implantation, or both. Let the FIB do what the FIB does best; let the PicoMill system do the rest

Model 1061 SEM Mill

Model 1061 SEM Mill

EBSDEDSMicro XRFSEMWDS

Table top precision preparation for producing high quality SEM samples for a wide variety of applications

Heating Module

Heating Module

In situSEM

A stable heating module capable of temperatures up to 1500°C for a range of in situ SEM studies with gas capable micro-environments enabled

Cryo Module 80 Kelvin

Cryo Module 80 Kelvin

Electron MicroscopyFIBIn situSEM

An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

SEM Peltier Module

SEM Peltier Module

In situSEM

With rapid temperature changes and precise control using a PID-controller, combined with quick lock connectors for fast turn around, makes this the perfect peltier stage

Electrostatic Beam Blanker

Electrostatic Beam Blanker

CLSEM

With rise time values <100 picoseconds, this beam blanker is ideally suited to the fast stroboscopic imaging required in voltage contrast, EBIC, OBIC, time-resolved cathodoluminescence and electron-beam lithography

SEM Add-on Tools

SEM Add-on Tools

In situSEM

Ingenious add-on tools for in situ experimentation that brings new capabilities to your SEM

Transfer Module

Transfer Module

Electron MicroscopyFIBIn situSEM

Made for the purpose of carrying delicate and sensitive specimens in a capsule from the SEM into a glove box, or vice versa, to ensure they are protected from air or moisture at all times.

Bending Module

Bending Module

In situSEM

World leading in situ materials testing of bending characteristics using your SEM

Anti Curtaining Table

Anti Curtaining Table

FIB

A four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is
perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam

DE-64

DE-64

Diffraction ImagingElectron MicroscopyTEM

Ideal for cryo-EM of very large viruses or cellular tomography. The DE-64 delivers user-adjustable full-frame streaming at up to 46 frames per second and offers unparalleled performance for electron counting.

DE-16

DE-16

Diffraction ImagingElectron MicroscopyTEM

The DE-16 features the 10th generation of our revolutionary Direct Detection Device (DDD®) sensor, delivering industry-leading resolution and flexible, seamless viewing on a 4k x 4k field-of-view. The DE-16 is our most versatile direct detection TEM camera that enables TEM experiments not previously possible on a direct detector.

DE-DirectView

DE-DirectView

Diffraction ImagingElectron MicroscopyTEM

Excellent upgrade option for your existing TEM offering low dose imaging, electron counting and 4D STEM

XCITE™ X-Ray Source

XCITE™ X-Ray Source

Micro XRFMicroscopy

Synchrotron and versatile performance X-ray source

TESCAN CoreTOM

TESCAN CoreTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

Multiscale 3D core imaging

TESCAN UniTOM XL

TESCAN UniTOM XL

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A unique alternative in Dynamic 3D X-ray imaging for your lab

Model 1040 NanoMill

Model 1040 NanoMill

Diffraction ImagingElectron MicroscopyFIBTEM

The NanoMill system is the ultimate companion for your FIB to optimise TEM specimen preparation quality

JOLT

JOLT

CLEDSSEM

Panchromatic and RGB Cathodoluminescence (CL) detector

TESCAN VEGA

TESCAN VEGA

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Analytical SEM for materials science and life science applications in research and industry

TESCAN AMBER 2 - Ga FIB-SEM

TESCAN AMBER 2 - Ga FIB-SEM

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

The most versatile and universal analytical Ga FIB-SEM platform on the market

TESCAN AMBER X 2 - Plasma FIB-SEM

TESCAN AMBER X 2 - Plasma FIB-SEM

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

Combining the speed of a plasma FIB with the resolution of a Ga FIB

TESCAN TIMA

TESCAN TIMA

Automated MineralogyEDSSEM

The TIMA is the most advanced Automated Mineralogy system

MM3E Micromanipulator

MM3E Micromanipulator

Electron MicroscopyFIBIn situSEM

Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

Tensile/Compression Module

Tensile/Compression Module

EBSDEDSIn situSEM

World leading in situ materials testing of tensile and compression characteristics using your SEM

Cryo Liftout System

Cryo Liftout System

FIBSEM

A cryo-compatible version of the Kleindiek micro-grippers that can be cooled to liquid nitrogen temperatures for in situ cryo TEM sample liftouts of site specific TEM slices prepared in cryo FIBs

SuperFlat AFM

SuperFlat AFM

AFM/SPM/SNOMIn situSEM

The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens the possibility of combining information on lateral dimensions and material from SEM inspection that can be readily complemented by precise topographical and force information in situ

EBIC Characterisation System

EBIC Characterisation System

In situSEM

An easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM's and FIB's making it the ideal choice for circuit testing and probing.

Climate∞

Climate∞

In situTEM

The Climate gas & heating solution enables dynamic studies of cyclic specimen transformations in gaseous environments at elevated temperatures and sub-Angstrom level.

Wildfire

Wildfire

In situTEM

Wildfire In situ TEM Heating

Lightning

Lightning

In situTEM

In Situ TEM Biasing & Heating
Sample Dynamics under controlled electrical and thermal environment.

Stream∞

Stream∞

In situTEM

STREAM; In Situ TEM Liquid, Liquid Biasing and Liquid Heating

NanoWorkstation

NanoWorkstation

FIBIn situSEM

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.

ProbeWorkstation for Electrical Characterisation of Semiconductors

ProbeWorkstation for Electrical Characterisation of Semiconductors

FIBIn situSEM

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

Model 2020 Advanced Tomography Holder

Model 2020 Advanced Tomography Holder

In situTEM

A revolutionary holder that allows room temperature data collection over wide tilt and translation ranges, even in restrictive pole-piece gap geometries