TESCAN SOLARIS X – Xe Plasma FIB-SEM for Semiconductors

Ultimate resolution and maximum throughput in large-scale sample preparation and characterisation

An Xe Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis.

Key Features
- NEW iFIB+™ Xe plasma FIB column - 2 μA probe current, fast and precise piezo-driven beam aperture change and gun alignment
- Precise piezo-driven beam aperture changer - fast switching between FIB pre-sets using a strip with 30 FIB apertures for extended lifetime and minimum maintenance
- Next generation Essence™ SW user interface - application-oriented, fully customisable and user-friendly layout
- World's largest FIB and SEM Field of views - unmatched FIB Field of View: 1 mm at 30 keV
- Smart and unique Triglav detection system - multi-detector system consisting of TriSE™ and TriBE™ enables collection of SE and BSE in the entire take-off angle range for maximum information of the sample
- Smart and patented In-Flight Beam Tracing™ - adaptive spot shape optimisation for better performance at high currents
- Enhancement of detection limits in ToF-SIMS analysis - no interference with the detection of other elements such as Ce, Ge and Ga

TESCAN SOLARIS X extends the capabilities of FIB physical failure analysis to large-area and deep cross-sectioning (up to 1 mm) of packaged microelectromechanical and optoelectronic devices, by combining the high-throughput i-FIB+™ Xe plasma FIB column with the next generation tripleobjective Triglav™ electron column.

Xe plasma FIB milling enables large-volume bulk material removal without the drawbacks of the traditionally used methods, which are often time-consuming, broadly destructive, dependent on operator skill, and can induce new heat/mechanical artifacts. Ion implantation and interaction ions. In addition, the inert nature of Xe ions prevents the formation of intermetallic compounds that can result in changes to the physical properties of the specimen and interfere with electrical measurements.

Analysis of Flexible OLEDs using an Xe plasma FIB-SEM

All
Additive Manufacturing
AFM/SPM/SNOM
ARPES
Automated Mineralogy
Bioprinting
CL
CLEM
Computed Tomography
Computed Tomography - Life Sci
Diffraction Imaging
Digital Microscopy
EBSD
EDS
Electron Beam Lithography (EBL)
Electron Microscopy
Fabrication
FIB
Hyperspectral
In situ
Laser spectroscopy
Light Microscopy
Micro XRF
Microscopy
Radiography
Raman
SEM
Spectroscopy
Super Resolution Microscopy
TEM
Thermal Probe Lithography
WDS
X-ray Imaging
X-ray Microscopy

NAZCA Microprinting Tool

Additive Manufacturing

Deposit any material on any substrate with unprecedented precision.

ASA Nanoindenter - Micromechanical Testing System

In situ

High-precision nanoindenter that can be customised with a range of accessories, consumables and controllers

Ultra High Strain Rate (UHS) Module

In situ

Redefining the boundaries of high strain rate and impact testing

LTM-Cryo Low Temperature Module

In situ

Retrofittable to the Alemnis ASA Nanoindenter/Micromechanical testing system

HTM-1000 High Temperature Module

In situ

Retrofittable to the Alemnis ASA Nanoindenter/Micromechanical testing system

QuiiN - Versatile Ion Implantation System

Fabrication

QuiiN Ion Implantation System - Nanoscale Quantum Ion Implanter

Alpha – Budget-Friendly 3D Printer

Additive Manufacturing

Ideal first step into high-resolution 3D printing

Profession – High-Volume 3D Printer

Additive Manufacturing

If you are looking to scale up production, or a high-resolution printer for producing larger components, the MiiCraft Profession is for you.

microArch D1025 - Hybrid Resolution 3D Printer

Additive Manufacturing

Industry’s first hybrid/dual resolution ultra-high resolution 3D printer

EclipseXRM-900 - High Resolution X-ray Microscope

Computed TomographyComputed Tomography - Life SciX-ray Microscopy

Submicron resolution even at large working distances

AconityTWO

Additive Manufacturing

Maximum productivity and system flexibility for LPBF fabrication

AconityMIDI+

Additive Manufacturing

Suited to efficient industrial LPBF applications

AconityMIDI

Additive Manufacturing

The ideal combination of flexibility and productivity

AconityMINI

Additive Manufacturing

The AconityMINI is Acontiy3D’s entry-level AM system. It offers a build space of Ø 140 mm and full access to all relevant process parameters.

AconityMICRO

Additive ManufacturingFabrication

Compact laser bed fusion machine

Prime 4K – 3D High-Resolution DLP Resin Printer

Additive ManufacturingBioprinting

Affordable DLP resin printer for microfluidics and dental

Lightning Arctic – In situ TEM Solution with Cooling/Heating and Biasing

In situ

In Situ TEM Cooling, Biasing & Heating for your TEM

Cathodyne - Optical Cathodoluminescence

A fast and sensitive optical CL imaging system that uses a plasma source and doesn't need a SEM to work.

ExoSEM - Ex Situ Bench for Thermo-Mechanical Testing

In situ

360° viewing during a thermal or thermomechanical test outside your SEM

FurnaSEM - in situ SEM Furnace

In situ

In Situ SEM furnace ideal for high temperature studies up to 1300°C. perform dynamic studies inside your SEM or under an optical microscope.

MT 1000 Tensile/Compression Stage

In situ

The most precise and functional thermo-mechanical testing system on the market

rePOWDER - Ultrasonic Atomisation System

Additive Manufacturing

Providing additive manufacturing researchers with the freedom to economically produce customised metal powders in small batches.

inFURNER - Vacuum Furnace

Additive ManufacturingFabrication

Ideal for metal 3D printing post-processing and other heat treatment processes requiring controlled atmospheres

TESCAN TENSOR - 4D STEM

TEM

A STEM that is as easy to use as a SEM

CERES - Metal Additive Micromanufacturing

Additive Manufacturing

Metal additive manufacturing at the micron-scale

microArch Industrial Micro Precision 3D Printers

Additive ManufacturingFabrication

Ultra-high resolution, accuracy and precision

NPS Nano Point Scanner

Digital MicroscopyMicroscopy

Metrology module for Hirox Digital Microscope – a complete inspection and measurement solution

UHV FIB-SEM NanoSpace

AFM/SPM/SNOMCLEDSElectron MicroscopyFabricationFIBSEMWDS

A versatile platform ideally suited to FIB-SEM applications in an UHV and contamination free environment

Model 1062 TrionMill

Electron MicroscopySEMTEM

Model 1062 TrionMill is an excellent tool for creating the sample surface characteristics needed for SEM imaging and analyses at shortest possible time and largest possible size.

LiteScope - AFM in Your SEM

AFM/SPM/SNOMElectron Microscopy

Correlative in situ AFM and SEM

NanoOne

Additive ManufacturingFabrication

NanoOne high throughput 3D printer with sub-micron resolution

Celeritas

TEM

A revolutionary new direct detection camera for four-dimensional scanning transmission electron microscopy (4D STEM) delivering more speed, more pixels and exceptional image quality.

Apollo

Diffraction ImagingElectron MicroscopyTEM

The world’s first event-based camera for high-throughput cryo-EM with no compromise in the QE and speed

TESCAN VEGA Compact

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Competitively priced, the TESCAN VEGA Compact is the ideal SEM for routine analysis in industrial labs or a teaching/imaging workhorse in microscopy facilities.

Model 2560 Vacuum Transfer Tomography Holder

Electron MicroscopyIn situTEM

An ideal platform to protect environmentally sensitive material during transfer to TEM’s

METEOR

CLEMSEM

METEOR is the world’s first and only fully integrated solution to optimise the cryo-ET workflow by reducing complicated transfer steps and increasing sample yield

PrismaXRM

Computed TomographyX-ray Microscopy

The World's First and only Tri-Phase Sub Micron Resolution Laboratory System

nano3DX

Computed TomographyComputed Tomography - Life SciX-ray Microscopy

The Rigaku nano3DX is a true sub-micron high-contrast X-ray microscope / microCT / Computed Tomography system ideal for low contrast imaging.

FF85 CT

Computed TomographyX-ray ImagingX-ray Microscopy

High-power, high-resolution computed tomography system ideally suited for inspections of a wide variety of small to medium sized items

Rigaku CT Lab HX

Additive ManufacturingComputed Tomography

Benchtop ergonomics Computed Tomography for materials science

FIB Stub 3.0

In situ

Prepare lamellae directly on your Nano-chip inside your FIB

HRX-01 Digital Microscope

Digital Microscopy

Bringing digital microscopy to a completely new level

TESCAN MAGNA

Electron Microscopy

Ultimate UHR-SEM with TESCAN TriLens™ immersion optics technology

TESCAN CLARA

Electron Microscopy

The only UHR-SEM on the market that doesn’t discriminate between samples

TESCAN SOLARIS

FIB

Highest quality TEM lamellae preparation and superior analytical performance

QM Quantum Microscope

ARPESDiffraction ImagingLaser spectroscopy

Completely configurable, the QM comprises a laser source (EUV and/or VUV), amplifier, beamline tailored to the user’s experiment, and imaging or other analysis workstations that can effectively cover the microscopy/spectroscopy landscape for nano-to-quantum materials

SPARC

CLHyperspectralRamanSEMSpectroscopy

SPARC: High-performance SEM cathodoluminescence detector

FF35 CT - Computed Tomography for Small and Medium Parts

Additive ManufacturingComputed TomographyX-ray ImagingX-ray Microscopy

High resolution industrial CT system for small/medium sized parts inspection

FF20 CT - MicroCT for Small Parts

Computed TomographyX-ray ImagingX-ray Microscopy

Ultimate automated semiconductor analysis

Eucentric Five Axis Table

EDSFIBSEM

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.

TESCAN DynaTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A dedicated 4D X-ray imaging

Model 2550 Cryo Transfer Tomography Holder

Electron MicroscopyIn situTEM

Cryo transfer and tomography of thin-film frozen-hydrated/vitrified specimens for low dose imaging and analysis

Model 1070 NanoClean

Electron MicroscopySEMTEM

Cleans specimens and holders immediately before insertion into an electron microscope; removes existing carbonaceous debris from the specimen and prevents contamination during imaging and analysis

Model 1051 TEM Mill

Diffraction ImagingFIBTEM

Table top precision preparation for producing high quality TEM samples for a wide variety of applications

Model 1080 PicoMill

Diffraction ImagingFIBTEM

The FIB is highly effective in preparing TEM specimens, but the use of a high-energy, liquid metal ion source can often result in specimen amorphization, gallium implantation, or both. Let the FIB do what the FIB does best; let the PicoMill system do the rest

Model 1061 SEM Mill

EBSDEDSMicro XRFSEMWDS

Table top precision preparation for producing high quality SEM samples for a wide variety of applications

Heating Module

In situSEM

A stable heating module capable of temperatures up to 1500°C for a range of in situ SEM studies with gas capable micro-environments enabled

Cryo Module 80 Kelvin

Electron MicroscopyFIBIn situSEM

An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

SEM Peltier Module

In situSEM

With rapid temperature changes and precise control using a PID-controller, combined with quick lock connectors for fast turn around, makes this the perfect peltier stage

Electrostatic Beam Blanker

CLSEM

With rise time values <100 picoseconds, this beam blanker is ideally suited to the fast stroboscopic imaging required in voltage contrast, EBIC, OBIC, time-resolved cathodoluminescence and electron-beam lithography

SEM Add-on Tools

In situSEM

Ingenious add-on tools for in situ experimentation that brings new capabilities to your SEM

Transfer Module

Electron MicroscopyFIBIn situSEM

Made for the purpose of carrying delicate and sensitive specimens in a capsule from the SEM into a glove box, or vice versa, to ensure they are protected from air or moisture at all times.

Bending Module

In situSEM

World leading in situ materials testing of bending characteristics using your SEM

Anti Curtaining Table

FIB

A four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is
perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam

DE-64

Diffraction ImagingElectron MicroscopyTEM

Ideal for cryo-EM of very large viruses or cellular tomography. The DE-64 delivers user-adjustable full-frame streaming at up to 46 frames per second and offers unparalleled performance for electron counting.

DE-16

Diffraction ImagingElectron MicroscopyTEM

The DE-16 features the 10th generation of our revolutionary Direct Detection Device (DDD®) sensor, delivering industry-leading resolution and flexible, seamless viewing on a 4k x 4k field-of-view. The DE-16 is our most versatile direct detection TEM camera that enables TEM experiments not previously possible on a direct detector.

DE-DirectView

Diffraction ImagingElectron MicroscopyTEM

Excellent upgrade option for your existing TEM offering low dose imaging, electron counting and 4D STEM

TESCAN MIRA

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Versatile and powerful FEG SEM

XCITE™ X-Ray Source

Micro XRFMicroscopy

Synchrotron and versatile performance X-ray source

TESCAN CoreTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

Multiscale 3D core imaging

TESCAN UniTOM XL

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A unique alternative in Dynamic 3D X-ray imaging for your lab

Model 1040 NanoMill

Diffraction ImagingElectron MicroscopyFIBTEM

The NanoMill system is the ultimate companion for your FIB to optimise TEM specimen preparation quality

JOLT

CLEDSSEM

Panchromatic and RGB Cathodoluminescence (CL) detector

TESCAN VEGA

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Analytical SEM for materials science and life science applications in research and industry

TESCAN AMBER 2 - Ga FIB-SEM

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

The most versatile and universal analytical Ga FIB-SEM platform on the market

TESCAN AMBER X 2 - Plasma FIB-SEM

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

Combining the speed of a plasma FIB with the resolution of a Ga FIB

TESCAN TIMA

Automated MineralogyEDSSEM

The TIMA is the most advanced Automated Mineralogy system

Cougar EVO Series - CT for Small Parts and Electronics

Computed TomographyRadiographyX-ray ImagingX-ray Microscopy

Scalable small footprint X-ray inspection systems for electronic componentry, and medical/military devices

MM3E Micromanipulator

Electron MicroscopyFIBIn situSEM

Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

Tensile/Compression Module

EBSDEDSIn situSEM

World leading in situ materials testing of tensile and compression characteristics using your SEM

SuperFlat AFM

AFM/SPM/SNOMIn situSEM

The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens the possibility of combining information on lateral dimensions and material from SEM inspection that can be readily complemented by precise topographical and force information in situ

EBIC Characterisation System

In situSEM

An easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM's and FIB's making it the ideal choice for circuit testing and probing.

Climate∞

In situTEM

Characterise your materials with sub-Angstrom resolution with dynamic studies featuring precise control over electrical, thermal and gas environments

Wildfire

In situTEM

Wildfire In situ TEM Heating

Lightning

In situTEM

In Situ TEM Biasing & Heating
Sample Dynamics under controlled electrical and thermal environment.

Stream∞

In situTEM

In situ TEM liquid platform with heating and biasing

NanoWorkstation

FIBIn situSEM

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.

NANORO M

Light MicroscopyMicroscopySuper Resolution Microscopy

Nanoro M- Super Resolution Optical Microscopy

ProbeWorkstation for Electrical Characterisation of Semiconductors

FIBIn situSEM

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

Model 2020 Advanced Tomography Holder

In situTEM

A revolutionary holder that allows room temperature data collection over wide tilt and translation ranges, even in restrictive pole-piece gap geometries

TESCAN SOLARIS X – Xe Plasma FIB-SEM for Semiconductors

Key Features

Contact

Brochure

AXT Supplier page

Supplier website

NAZCA Microprinting Tool

ASA Nanoindenter - Micromechanical Testing System

Ultra High Strain Rate (UHS) Module

LTM-Cryo Low Temperature Module

HTM-1000 High Temperature Module

QuiiN - Versatile Ion Implantation System

Alpha – Budget-Friendly 3D Printer

Profession – High-Volume 3D Printer

microArch D1025 - Hybrid Resolution 3D Printer

EclipseXRM-900 - High Resolution X-ray Microscope

AconityTWO

AconityMIDI+

AconityMIDI

AconityMINI

AconityMICRO

Prime 4K – 3D High-Resolution DLP Resin Printer

Lightning Arctic – In situ TEM Solution with Cooling/Heating and Biasing

Cathodyne - Optical Cathodoluminescence

ExoSEM - Ex Situ Bench for Thermo-Mechanical Testing

FurnaSEM - in situ SEM Furnace

MT 1000 Tensile/Compression Stage

rePOWDER - Ultrasonic Atomisation System

inFURNER - Vacuum Furnace

TESCAN TENSOR - 4D STEM

CERES - Metal Additive Micromanufacturing

microArch Industrial Micro Precision 3D Printers

NPS Nano Point Scanner

UHV FIB-SEM NanoSpace

Model 1062 TrionMill

LiteScope - AFM in Your SEM

NanoOne

Celeritas

Apollo

TESCAN VEGA Compact

Model 2560 Vacuum Transfer Tomography Holder

METEOR

PrismaXRM

nano3DX

FF85 CT

Rigaku CT Lab HX

FIB Stub 3.0

HRX-01 Digital Microscope

TESCAN MAGNA

TESCAN CLARA

TESCAN SOLARIS

QM Quantum Microscope

SPARC

FF35 CT - Computed Tomography for Small and Medium Parts

FF20 CT - MicroCT for Small Parts

Eucentric Five Axis Table

TESCAN DynaTOM

Model 2550 Cryo Transfer Tomography Holder

Model 1070 NanoClean

Model 1051 TEM Mill

Model 1080 PicoMill

Model 1061 SEM Mill

Heating Module

Cryo Module 80 Kelvin

SEM Peltier Module

Electrostatic Beam Blanker

SEM Add-on Tools

Transfer Module

Bending Module

Anti Curtaining Table

DE-64

DE-16

DE-DirectView

TESCAN MIRA

XCITE™ X-Ray Source

TESCAN CoreTOM

TESCAN UniTOM XL

Model 1040 NanoMill

JOLT

TESCAN VEGA